The following dataset is analyzed in the article "Achieving Uniformity in a Semiconductor Fabrication Process Using Spatial Modeling" by J.M. Hughes-Oliver, J.C. Lu, J.C. Davis and R.S. Gyurcsik, which is to appear in JASA Case Studies and Applications, March 1998, vol. 93. This dataset has been placed by Jacqueline M. Hughes-Oliver, Department of Statistics, North Carolina State University, Raleigh, NC 27695-8203; email: hughesol@stat.ncsu.edu. She will attempt to answer questions, but please see the above mentioned article for a complete description of the dataset. This dataset can be freely used for non-commercial purposes and may be freely distributed. The data consists of measurements of polysilicon thickness at 13 sites on 22 wafers processed using Rapid Thermal Chemical Vapor Deposition. The processing conditions are determined by: (1) thickness of oxide applied to the wafer prior to deposition of polysilicon; and (2) deposition time. The columns are given in the following order: wafer label, oxide thickness (in angstroms), deposition time (in seconds), polysilicon thickness (in angstroms) for locations 1 to 13. A16 1059 18 494 536 564 534 423 549 579 553 470 497 530 502 347 A17 1049 35 853 886 916 891 761 899 928 904 813 837 870 839 607 A18 1039 52 1090 1131 1190 1139 965 1149 1204 1148 1029 1053 1094 1053 803 A19 1026 52 1058 1107 1171 1130 951 1150 1203 1166 1040 1060 1111 1072 865 A20 1001 18 517 548 587 561 427 564 603 581 492 508 544 517 381 A21 986 35 882 925 965 933 781 940 982 956 856 876 915 880 687 A23 1447 35 732 770 794 770 675 782 807 790 715 740 769 746 605 B2 458 35 1143 1202 1280 1286 982 1232 1320 1261 1110 1189 1204 1202 1097 B3 1263 23 608 647 663 635 541 653 673 646 574 611 632 600 467 B4 1283 23 590 621 641 621 531 635 655 636 562 596 622 595 468 B5 1301 47 940 982 1018 983 844 985 1031 998 904 921 956 928 733 B6 1287 47 920 962 997 964 837 975 1022 990 880 922 963 935 748 B7 1300 47 917 961 997 969 843 981 1023 994 886 932 966 935 768 B8 1307 23 581 610 631 611 517 617 641 626 548 577 603 583 444 B9 632 23 738 802 857 832 616 841 894 863 722 760 824 773 565 B10 621 23 732 799 832 786 608 802 849 810 656 707 755 716 491 B11 623 23 750 817 858 818 641 838 883 842 694 756 805 762 552 B12 620 47 1205 1289 1374 1298 1043 1316 1422 1336 1164 1207 1279 1207 932 B13 613 47 1194 1299 1373 1289 1044 1319 1423 1334 1247 1199 1278 1212 927 B16 615 47 1221 1326 1394 1299 1039 1325 1433 1336 1187 1195 1264 1198 876 B17 478 35 1209 1225 1224 1218 928 1234 1255 1210 1004 1264 1219 1192 815 B21 1498 35 708 745 761 741 645 750 771 751 673 712 732 705 560